摘要：双光子聚合(TPP)是通过光敏剂中的非线性双光子吸收过程所引发的,其作为一种新工艺,自问世以来,已在二维和三维加工聚合应用领域中得到广泛研究.对于二维纳米图案的加工,纳复制工艺已经演变为体素模板扫描方法.该方法用黑白双色2块图作为设计图案,并转排成体素模板以控制聚焦激光素的开关.复杂的三维微结构也可以采用多重断面分层叠加的方法进行加工,各断面的扫描数据从三维CAD数据中得到.在聚合反应后,没有固化的液态树脂,其采用在树脂上浇注类似于酒精之类溶剂的方法去除,从而显露出聚合的微结构.在前期的工作中,已经成功地加工出了高空间分辨力的三维微光学器件,分辨力约为100nm.微机械器件和光子晶体等的近期研究工作提高了其TPP的效率和精度.介绍了近来开发的基于TPP的一些微加工工艺.%Since it has emerged as a new technology, two-photon polymerization (TPP) initiated through the non-linear process of a two-photon absorption in a photosensitizer has been studied intensively in two- and three-dimensional (2D and 3D) microfabrications for various polymeric applications. For the fabrication of 2D nano-patterns, a nano-replication printing (nRP) process has been developed using a voxel matrix scanning method. In this method, a two-tone (black and white) bitmap figure is used as the designed pattern shape and is transformed into a voxel matrix in order to control the on/off of a focused laser beam. Complicated 3D microstructures can also be fabricated using layer-by-layer accumulation of the sliced multiple contour scanning data derived from the 3D CAD data. After the polymerization process, the unsolidified liquid-state resin is removed by pouring solvents, such as ethanol, onto the resin, and then the polymerized microstructures are developed. In previous works, 3D micro-optical components, micromechanical devices, and photonic crystals have been fabricated successfully with a high spatial resolution of approximately 100 nm. Recent efforts have also improved the efficiency and precision of TPP. This paper presents the microfabrication techniques based on TPP recently developed in our Department.