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SUPER-JUNCTION TRENCH MOSFETS WITH SHORT TERMINATIONS
SUPER-JUNCTION TRENCH MOSFETS WITH SHORT TERMINATIONS
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机译:具有短端接的超结型沟道MOSFET
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摘要
A super-junction trench MOSFET with a short termination area is disclosed, wherein the short termination area comprising a charge balance region and a channel stop region formed near a top surface of an epitaxial layer with a trenched termination contact penetrating therethrough.
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