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Charge-trap nonvolatile memory devices

机译:电荷陷阱非易失性存储设备

摘要

Nonvolatile memory devices including device isolation patterns on a semiconductor substrate are provided. The device isolation patterns define a cell active region and a peripheral active region of the semiconductor substrate. Cell gate electrodes are provided that cross over the cell active regions. Memory cell patterns are provided between the cell gate electrodes and the cell active regions and extend toward the device isolation patterns. A tunnel insulation film is provided between the memory cell pattern and the cell active region. Related methods of fabricating nonvolatile memory devices are also provided herein.
机译:提供了在半导体衬底上包括器件隔离图案的非易失性存储器件。器件隔离图案限定了半导体衬底的单元有源区和外围有源区。提供跨过单元有源区的单元栅电极。存储单元图案设置在单元栅电极与单元有源区之间,并朝着器件隔离图案延伸。在存储单元图案和单元有源区之间提供隧道绝缘膜。本文还提供了制造非易失性存储器件的相关方法。

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