MEMS DEVICE, MEMS PACKAGE HAVING MEMS DEVICE, AND USER TERMINAL HAVING MEMS DEVICE

摘要

The present invention provides a MEMS device, a MEMS package having the MEMS device, and a user terminal having the MEMS device. The MEMS device comprises: a fixing unit; a plurality of first masses connected to the fixing unit by a spring, and facing each other in the first direction; and a plurality of moving electrodes connected to each first mass using the spring, and having a comb structure. The moving electrodes are able to be separated from the first masses to be moved when a Coriolis force is provided.;COPYRIGHT KIPO 2017