机译:MEMS器件在纳米卫星中的应用
Department of Precision Instruments and Mechanotogy, Tsinghua University, Beijing 100084, China;
Department of Precision Instruments and Mechanotogy, Tsinghua University, Beijing 100084, China;
Department of Precision Instruments and Mechanotogy, Tsinghua University, Beijing 100084, China;
Department of Precision Instruments and Mechanotogy, Tsinghua University, Beijing 100084, China;
MEMS器件; 纳米卫星; 应用; 互补金属氧化物半导体; 微型惯性测量单元; MEMS技术; 微机电系统; 太阳传感器;