微型传感器中氮化硅薄膜的微加工技术

摘要

简要介绍了基于磁控射频溅射技术的Si3N4薄膜沉积技术及Si3N4薄膜基于剥离(lift-off)技术的微加工技术。实验结果表明该技术适用于微型传感器及MEMS中绝缘薄膜的加工。%The depositon of silicon nitride film based on RFmagnetron-sputtering and the micorfabrication of silicon nitride film based on lift-off technique are described in this article. The experiment result showed that it is an effective method of Si3N4 film's fabrication for microsensor and MEMS purpose.