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Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon

机译：通过氢或氦注入进行衬底工程以在硅上外延生长晶格失配的Si / sub 1-x / Ge / sub x /膜

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《Ion Implantation Technology, 2000. Conference on》|2000年|P.326-329|共4页
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Holldnder; B.; Lenk; St.;
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中图分类无线电电子学、电信技术;
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1. Epitaxial growth of CdSe_xTe_(1-x) thin films on Si(100) by molecular beam epitaxy using lattice mismatch graded structures [J] . F.Z. Amir, K. Clark, E. Maldonado, Journal of Crystal Growth . 2008,第6期

机译：CdSe_xTe_（1-x）薄膜在Si（100）上通过分子束外延使用晶格失配梯度结构外延生长
2. Epitaxial Growth And Magnetic Properties Of Ferromagnetic Semiconductor Ge_(1-x)fe_x Thin Films Epitaxially Grown On Si(001) Substrates [J] . Yusuke Shuto, Masaaki Tanaka, Satoshi Sugahara Japanese journal of applied physics . 2008,第9issue1期

机译：Si（001）衬底上外延生长的铁磁半导体Ge_（1-x）fe_x薄膜的外延生长和磁性
3. Epitaxial growth of ultrahigh density Ge_(1-x)Sn_x quantum dots on Si (111) substrates by codeposition of Ge and Sn on ultrathin SiO_2 films [J] . Yoshiaki Nakamura, Akiko Masada, Sung-Pyo Cho, Journal of Applied Physics . 2007,第12期

机译：通过在超薄SiO_2膜上共沉积Ge和Sn来在Si（111）衬底上外延生长超高密度Ge_（1-x）Sn_x量子点
4. Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si{sub}(1-x)Ge{sub}x films on silicon [C] . B. Hollander, St. Lenk, S. Mantl, International Conference on Ion Implantation Technology . 2000

机译：基板工程通过氢气或氦气植入，用于外延生长的晶格错配的Si {Sub}（1-x）Ge {Sub} X薄膜
5. Compliant substrate of silicon-on-insulator for lattice-mismatched epitaxial films. [D] . Yang, Zhijian. 1999

机译：晶格不匹配的外延膜的绝缘体上硅衬底。
6. Columnar structured FePt films epitaxially grown on large lattice mismatched intermediate layer [O] . K. F. Dong, J. Y. Deng, Y. G. Peng, -1

机译：在大晶格失配中间层上外延生长的柱状结构FePt膜
7. Effect of Hydrogen Annealing on the Property of Low-temperature Epitaxial Growth of Sige Thin Films on Si Substrate [O] . WANG Jin, TAO Ke, LI Guo-Feng, 2017

机译：氢退火对Si衬底上SiGe薄膜低温外延生长的影响
8. Kinetic Aspects of Lattice Mismatch in Molecular Beam Epitaxial Growth on Planar and Patterned Substrates. [R] . Madhukar, A. 1993

机译：平面和图案基板上分子束外延生长中晶格失配的动力学方面。

Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si/sub 1-x/Ge/sub x/ films on silicon

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