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Methods of contacting lines and methods of forming an electrical contact in a semiconductor device

机译:半导体器件中的接触线的方法和形成电接触的方法

摘要

Methods of forming contacts, methods of contacting lines, methods of operating integrated circuitry, and related integrated circuitry constructions are described. In one embodiment, a plurality of conductive lines are formed over a substrate and diffusion regions are formed within the substrate elevationally below the lines. The individual diffusion regions are disposed proximate individual conductive line portions and collectively define therewith individual contact pads with which electrical connection is desired. Insulative material is formed over the conductive line portions and diffusion regions, with contact openings being formed therethrough to expose portions of the individual contact pads. Conductive contacts are formed within the contact openings and in electrical connection with the individual contact pads. In a preferred embodiment, the substrate and diffusion regions provide a pn junction which is configured for biasing into a reverse-biased diode configuration. In operation, the pn junction is sufficiently biased to preclude electrical shorting between the conductive line and the substrate for selected magnitudes of electrical current provided through the conductive line and the conductive material forming the conductive contacts.
机译:描述了形成接触的方法,接触线的方法,操作集成电路的方法以及相关的集成电路构造。在一实施例中,多条导电线形成在衬底上方,并且扩散区域在这些线下方垂直地形成在衬底内。各个扩散区域布置在各个导线部分附近,并且一起共同限定了需要电连接的各个接触垫。绝缘材料形成在导线部分和扩散区域上,其中形成有贯穿其的接触开口以暴露各个接触垫的部分。导电接触件形成在接触件开口内并与各个接触垫电连接。在优选实施例中,衬底和扩散区域提供被配置用于偏置为反向偏置的二极管配置的pn结。在操作中,pn结被充分偏置以防止对于通过导电线和形成导电触点的导电材料提供的选定大小的电流,导电线和基板之间的电短路。

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