Methods Of Forming Electrically Conductive Lines, Methods Of Forming An Electrically Conductive Buried Line And An Electrical Contact Thereto, Electrically Conductive Lines, And Integrated Circuitry Comprising A Line Of Recessed Access Devices

摘要

A method of forming an electrically conductive buried line and an electrical contact thereto includes forming of a longitudinally elongated conductive line within a trench in substrate material. A longitudinal end part thereof within the trench is of spoon-like shape having a receptacle. The receptacle is filled with conductive material. Insulative material is formed over the conductive material that is within the receptacle. A contact opening is formed over the conductive material that is within the receptacle. Conductor material is formed in the contact opening in electrical connection with the second conductive material that is within the receptacle. Other method and device implementations are disclosed.