Method of verifying layout data for semiconductor device

摘要

A data verification method executed by a data verification device that verifies hierarchical structure layout data for a semiconductor device. The method includes retrieving a verification condition that is set in accordance with a data processing system which processes the layout data generated by and provided from a designing device, extracting shaped item existing range information and possessive layout information from the layout data to generate a hierarchical expansion table, cumulating the possessive layout information associated with each cell from an uppermost layer cell of a layout path to a target cell, calculating a cumulative value of the possessive layout information for the layout path, determining whether or not the possessive layout information satisfies the verification condition based on the cumulative value, the verification condition, and the possessive layout information, and determining whether or not the shaped item existing range information satisfies the verification condition.