METHOD FOR MANUFACTURING METAL-CERAMIC SUBSTRATE WITH TRIMMED RESISTORS AND METAL-CERAMIC SUBSTRATE WITH TRIMMED RESISTORS

摘要

The invention relates to a method for manufacturing a metal-ceramic substrate (10), including providing a central ceramic insulation layer (20) with a conductive metal layer (30) on one or both of its surfaces. Laser ablation with an ultrashort pulse laser is performed on at least one conductive metal layer (30) locally within an ablation area (31) until a certain resistivity of the conductive metal layer (30) is achieved in this ablation area (31). Thereby, the thickness of the conductive metal layer (30) in the ablation area (31) is reduced to a value above zero so that certain resistance values can be achieved in order to form resistors on the metal-ceramic substrate (10). The invention also relates to a corresponding metal-ceramic substrate which has been manufactured by such method. In particular, the conductive metal layer (30) is made of copper which is applied to the central ceramic layer (20) by means of a DCB process to form a DCB substrate.