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New trim configurations for laser trimmed thick-film resistors—theoretical analysis, numerical simulation and experimental verification

机译:激光修整厚膜电阻的新修整配置—理论分析,数值模拟和实验验证

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摘要

In this paper a new approach to laser trimming is investigated and compared with traditional trimming. It relies on creating an additional contact for lowering resistance values thus simplifying the design and widening resistance trimming ranges. This enables to achieve a correction with shorter cut length of, so it can lead to a faster and cheaper fabrication process of hybrid integrated circuit. This paper analyses trimming range and trimming characteristics computed for different shapes of added contact using a new, very fast and easily programmable method. Moreover the experimental verification of such approach is presented. The relative trimming range and sensitivity are analyzed as a function of additional contact shape and cut length. Next long-term stability, pulse durability and low frequency noise are compared for two- and three-contact resistors versus trim pathway length.
机译:本文研究了一种新的激光修整方法,并将其与传统修整方法进行了比较。它依靠创建额外的触点来降低电阻值,从而简化了设计并扩大了电阻调整范围。这使得能够以更短的切割长度实现校正,因此可以导致混合集成电路的制造过程更快,更便宜。本文使用一种新的,非常快速且易于编程的方法来分析针对不同形状的附加触点计算出的修整范围和修整特性。此外,提出了这种方法的实验验证。相对修整范围和灵敏度根据附加触点形状和切割长度进行分析。比较了两触点和三触点电阻的下一个长期稳定性,脉冲耐久性和低频噪声与微调通道长度的关系。

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