首页> 外国专利> PALLADIUM-COATED COPPER BONDING WIRE, WIRE-BONDED STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

PALLADIUM-COATED COPPER BONDING WIRE, WIRE-BONDED STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

机译:钯包铜键合线,线结合结构,半导体装置以及制造半导体装置的方法

摘要

Provided are: a palladium-coated copper bonding wire which does not undergo the formation of shrinkage cavities during a first bonding procedure, has high bonding reliability, and can keep excellent bonding reliability steadily for a long period even under a high-temperature high-humidity environment; a bonded structure of the palladium-coated copper bonding wire; a semiconductor device; and a method for manufacturing a semiconductor device. A bonding wire which is a Pd-coated copper bonding wire comprising a copper core material and a Pd layer and containing a sulfur-group element, wherein the concentration of Pd is 1.0 to 4.0% by mass, the total concentration of the sulfur-group element is 50 ppm by mass or less, and the concentration of S is 5 to 2 ppm by mass or the concentration of Se is 5 to 20 ppm by mass or the concentration of Te is 15 to 50 ppm by mass inclusive all relative to the total amount of copper, Pd and the sulfur-group element; and a wire-bonded structure having a Pd-rich bonding region which is located in the vicinity of a bonding face between an Al-containing electrode and a ball bonding part in an semiconductor chip and in which the Pd concentration is 2.0% by mass or more relative to the total concentration of Al, copper and Pd.
机译:提供:在第一键合工序中不发生缩孔的镀钯铜键合线,其键合可靠性高,即使在高温高湿下也能够长期稳定地保持优异的键合可靠性。环境;镀钯铜键合线的键合结构;半导体器件;以及用于制造半导体器件的方法。接合线,其为包含铜芯材料和Pd层且包含硫族元素的Pd被覆铜接合线,其中,Pd的浓度为硫基的总浓度为1.0〜4.0质量%。相对于硅,元素的质量分数为50质量ppm以下,S的浓度为5〜2质量ppm,或者Se的浓度为5〜20质量ppm,Te的浓度为15〜50质量ppm。铜,钯和硫族元素的总量;引线接合结构具有Pd浓度为2.0质量%以上的富Pd接合区域,该Pd浓度位于半导体芯片中的含Al电极与球接合部之间的接合面附近。相对于铝,铜和钯的总浓度而言。

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