In this study, we propose a triaxial force measurement sensor probe with piezoresistors fabricated via sidewall doping using rapid thermal diffusion. The device was developed as a tool for measuring micronewton-level forces as vector quantities. The device consists of a 15 μm thick cantilever, two sensing beams and four wiring beams. The length and width of the cantilever are 1240 μm and 140 μm, respectively, with a beam span of 1200 μm and a width of 10-15 μm. The piezoresistors are formed at the root of the cantilever and the sidewalls of the two sensing beams. The sensor spring constants for each axis were measured at k_x = 1.5 N m~(-1), k_y = 3.5 N m~(-1) and k_z = 0.64 N m~(-1). We confirmed that our device was capable of measuring triaxial forces with a minimum detectable force at the submicronewton level.
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机译：在这项研究中，我们提出了一种三轴力测量传感器探头，该探头具有通过使用快速热扩散进行侧壁掺杂而制成的压敏电阻。该设备被开发为测量微牛水平力作为矢量的工具。该设备包括一个15μm厚的悬臂，两个感应光束和四个接线光束。悬臂的长度和宽度分别为1240μm和140μm，光束跨度为1200μm，宽度为10-15μm。压敏电阻形成在悬臂的根部和两个感应光束的侧壁处。在k_x = 1.5 N m〜（-1），k_y = 3.5 N m〜（-1）和k_z = 0.64 N m〜（-1）时测量每个轴的传感器弹簧常数。我们确认我们的设备能够在亚微牛顿水平以最小的可检测力测量三轴力。
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