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Piezoresistive doped DLC sensor layer, process for its preparation, force sensor, process for its preparation and its use
Piezoresistive doped DLC sensor layer, process for its preparation, force sensor, process for its preparation and its use
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机译:压阻掺杂DLC传感器层,其制备过程,力传感器,其制备过程及其用途
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摘要
A sensor layer for a diamond-like carbon (DLC) force sensor doped with at least one metal-nitrogen compound, wherein the metal-nitrogen compound is in the form of particles of size less than 100 nm and the metal is selected from Ga , In, B and Zn.
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