Oxidation of copper pads and its influence on the quality of Au/Cu bonds during thermosonic wire bonding process

摘要

To understand the copper oxide effect on the bondability of gold wire onto a copper pad, thermosonic gold wire bonding to a copper pad was conducted at 90-200℃ under an air atmosphere. The bondability and bonding strength of the Au/Cu bonds were investigated. The bondability and bonding strength were far below the minimum requirements stated in industrial codes. At elevated bonding temperature of 200℃, the bondability and bonding strength deteriorated mainly due to hydroxide and copper oxide formation on the copper pad. Oxide formation occurred if no appropriate oxide preventive schemes were applied. At lower bonding temperature, 90℃, poor bondability and low bonding strength were mainly attributed to insufficient thermal energy for atomic inter-diffusion between the gold ball and copper pad. Copper pad oxidation was investigated using an electron spectroscopy for chemical analysis (ESCA) and thermo-gravimetric analysis (TGA). An activation energy of 35 kJ/mol for copper pad oxidation was obtained from TGA. This implies that different mechanisms govern the oxidation of copper pad and bulk copper. Hydroxide and copper oxide were identified based on the shifted binding energy. Cu(OH)_2 forms mainly on the top surface of copper pads and the underlying layer consists mainly of CuO. The hydroxide concentration increased with increasing the heating temperatures. After heating at 200℃, the hydroxide concentration on the copper pad surface was approximately six times that at 90℃. Protective measures such as passivation layer deposition or using shielding gas are critical for thermosonic wire bonding on chips with copper interconnects.