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Choice of epitaxial structure to promote performance and uniformity of GaAs/AlGaAs heterojunction bipolar transistors grown by MOVPE

机译:选择外延结构以提高MOVPE生长的GaAs / AlGaAs异质结双极晶体管的性能和均匀性

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Numerical simulations with a one-dimensional physical device model are used to investigate the importance of the design of the emitter and base regions of n-p-n GaAs/AlGaAs HBT structures. A structure of optimum gain and speed is determined together with limits for the variations of the aluminum gradings and doping placement. The simulations show that the edge of the base doping on the emitter side has to be controlled within a few nanometers to avoid serious degradations of the current gain and the cutoff frequency. Variation in the position of the base doping relative to the aluminum gradings is a plausible source of the spread in current gain observed in measurements of devices made by metalorganic vapor-phase epitaxy (MOVPE). It is predicted that longer emitter aluminum gradings will reduce the sensitivity to these variations together with the peak values of gain and speed. It is suggested that the grading length be chosen as a compromise between performance and uniformity depending on the accuracy of the manufacturing method and the demands of the application.
机译:用一维物理器件模型进行数值模拟,以研究设计n-p-n GaAs / AlGaAs HBT结构的发射极和基极区的重要性。确定最佳增益和速度的结构,以及铝等级和掺杂位置变化的限制。仿真表明,必须将发射极侧的基极掺杂边缘控制在几纳米以内,以避免电流增益和截止频率的严重下降。基本掺杂相对于铝等级的位置的变化是在通过金属有机气相外延(MOVPE)制成的器件的测量中观察到的电流增益扩展的合理来源。据预测,较长的发射极铝等级将降低对这些变化的敏感性以及增益和速度的峰值。建议根据制造方法的精度和应用需求,选择平整长度作为性能和均匀性之间的折衷。

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