CMOS micromachined cantilever-in-cantilever devices with magnetic actuation

摘要

A novel magnetically actuated cantilever microactuator which produces a large angular deflection is described. The device is a nested cantilever structure for improved sensitivity, and is fabricated entirely using a standard CMOS process. The cantilever deflects bidirectionally, and has a static deflection of more than 2.5/spl deg/. It has a response time of 25 /spl mu/s and at resonance has a deflection of more than 25/spl deg/.