碳化硅肖特基器件技术研究

摘要

Aiming at the key technology of silicon carbide schottky diodes,the study is conducted, for the development of research,production and application,to solve the problems in the process of designing and manufacturing.The oxidation technology, etching technology, doping technology and metallization technology are improved for silicon carbide schottky diodes. The diodes, with the characteristics of small leakage current,low resistance and good high temperature stability,are used in power switch such as active power factor correction for the switch mode power supply and motor drive.%针对碳化硅肖特基二极管的关键技术，促进国内碳化硅肖特基二极管有理论研究走向实际产品并向应用发展，力求解决碳化硅肖特基二极管设计及制造过程中的技术问题，深入分析氧化技术，刻蚀技术，掺杂技术，金属化技术等关键技术，研制出碳化硅肖特基二极管器件，并且器件技术指标良好。器件已应用在开关模式电源的有源功率因数校正和电机驱动器等电源转换方面，达到了漏电流小，通态电阻低，高温工作稳定性良好等要求。