基于CMOS制造工艺的电容型湿度传感器

摘要

This paper designed a capacitive humidity sensor by CMOS fabrication technology and described the process in detail. And it studied the working principle by introducing parallel plate capacitor model and H_2O sorption model. It analyzed its performance and parameter by experiment. And it introduced the difficulties of the produce process.%设计了一种基于CMOS制造工艺的电容型湿度传感器,详细讲述了制作过程.通过引入平行板电容模型和水分子吸附模型研究了其工作机理,通过实验对其湿容特性、响应特性、湿滞等参数做了测试与分析.制作过程中的难点在于聚酰胺酸膜的亚胺化以及聚酰亚胺的光刻工艺.