新型MEMS质量传感器的研究

摘要

研究了一种新型MEMS质量传感器的设计、仿真与制造.这种用于流体中微小分子质量检测的MEMS器件,具有高度对称的中空圆盘结构,以谐振的方式工作于简并/解并模态,能在测量时实现对环境波动的自我补偿.器件的中空腔内可以流过被测流体,腔外的真空环境使得圆盘谐振器受到更小的阻尼.利用ANSYS对圆盘在质量吸附前后的模态及频率分裂进行仿真,计算结果显示对质量的测量灵敏度达pg量级.采用MEMS双牺牲层工艺方法成功制作出具有双层结构的空心圆盘谐振器.%This paper investigated the design,simulation and fabrication of a novel MEMS mass sensor. The highly symmetric MEMS device used for micro-molecule mass sensing in fluid, worked in the principle of mode degeneration and non-degeneration when resonating, being advantaged in self-compensating with environmental fluctuation. Analyte is confined in the hollow channel, external surrounded by vacuum environment eliminating viscous damping. Modes of disk when mass sorption/desorption were simulated in ANSYS.and an order of pg test resolution can be obtained. Using a standard MEMS process flow,the hollow disk resonator with double structures was fabricated with dual-sacrificial-layer.