MEMS GAS SENSOR, MEMS GAS SENSOR MOUNTING BODY, MEMS GAS SENSOR PACKAGE, MEMS GAS SENSOR ASSEMBLY, AND MANUFACTURING METHOD OF MEMS GAS SENSOR

摘要

PROBLEM TO BE SOLVED: To miniaturize a package for storing a MEMS gas sensor.;SOLUTION: A MEMS gas sensor 1 has a base 3, a gas-sensitive material 33, and an electrode wiring pattern 29. The base 3 has a cavity 3c. The gas-sensitive material 33 is provided on the bottom surface of the cavity 3c. The electrode wiring pattern 29 is connected to the gas-sensitive material 33. The electrode wiring pattern 29 has an electrode pad 28 exposed to the opposite side to the bottom surface of the base 3.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT