MEMS GAS SENSOR AND MEMS GAS SENSOR MANUFACTURING METHOD

摘要

[Problem] To extend the lifespan of an MEMS gas sensor. [Solution] This MEMS gas sensor 1 comprises an insulator 3, a gas-sensing material 33, a first oxide film 6 and interlayer insulation film 13, a heater wiring pattern 23, and a lower protective film 11 and upper protective film 20. The insulator has a cavity 3c. The gas-sensing material 33 is provided so as to correspond to the cavity 3c. The first oxide film 6 and interlayer insulation film 13 are provided on the insulator 3 so as to overlap with each other in a plan view. The heater wiring pattern 23 is for heating the gas-sensing material 33 and is disposed between the first oxide film 6 and interlayer insulation film 13. The lower protective film 11 and upper protective film 20 adhere to and cover the upper surface 23c, lower surface 23d, and lateral surface 23e of the heater wiring pattern 23.