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Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors

机译：通过SiC，蓝宝石，玻璃和陶瓷中的激光烧蚀来制造膜，用于GaN /铁电薄膜MEMS和压力传感器

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1. Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors [J] . Zehetner J., Kraus S., Lucki M., Microsystem technologies . 2016,第7期

机译：通过SiC，蓝宝石，玻璃和陶瓷中的激光烧蚀来制造膜，用于GaN /铁电薄膜MEMS和压力传感器
2. Structural and compositional characterization of MOVPE GaN thin films transferred from sapphire to glass substrates using chemical liftoff and room temperature direct wafer bonding and GaN wafer scale MOVPE growth on ZnO-buffered sapphire [J] . S. Gautier, T. Moudakir, G. Patriarche, Journal of Crystal Growth . 2013,第maya1期

机译：使用化学剥离和室温直接晶片键合以及GaN晶片规模在ZnO缓冲蓝宝石上进行GaN晶片规模的MOVPE生长，从蓝宝石转移到玻璃基板的MOVPE GaN薄膜的结构和成分表征
3. Stable p-type ZnO thin films on sapphire and n-type 4H-SiC achieved by controlling oxygen pressure using radical-source laser molecular beam epitaxy [J] . Li Meng, Jingwen Zhang, Jian An, Physica status solidi . 2016,第1期

机译：通过使用自由基源激光分子束外延控制氧气压力，在蓝宝石和n型4H-SiC上获得稳定的p型ZnO薄膜
4. Laser ablation for membrane processing of AlGaN/GaN- and micro structured ferroelectric thin film MEMS and SiC pressure sensors for extreme conditions [C] . J. Zehetner, G. Vanko, J.Dzuba, Smart sensors, actuators, and MEMS VII; and Cyber physical systems . 2015

机译：激光烧蚀用于极端条件下的AlGaN / GaN和微结构铁电薄膜MEMS和SiC压力传感器的膜处理
5. Determination via luminescence spectroscopy and x-ray diffraction of the strain and composition of GaN and Al(x)Ga(1-x)N thin films grown on 6H-SiC(0001) substrates. [D] . Perry, William George. 1997

机译：通过发光光谱和X射线衍射测定在6H-SiC（0001）衬底上生长的GaN和Al（x）Ga（1-x）N薄膜的应变和组成。
6. Study of the Wavelength Dependence in Laser Ablation of Advanced Ceramics and Glass-Ceramic Materials in the Nanosecond Range [O] . Daniel Sola, Jose I. Peña 2013

机译：纳秒范围内高级陶瓷和玻璃陶瓷材料激光烧蚀的波长相关性研究
7. In situhole doping of wide-gap semiconductors by dual-target simultaneous laser ablation: GaN and SiC epitaxial films [O] . Hachizo Muto, Takashi Asano, Rong-Ping Wang, 2005

机译：通过双靶同时激光消融宽间隙半导体的情况下掺杂：GaN和SiC外延薄膜
8. Investigation of the Characteristics of Ferroelectric Thin Films Deposited byPulsed Laser Ablation [R] . Sengupta, S., Sonnenberg, N., Vijay, D. P., 1994

机译：激光烧蚀沉积铁电薄膜特性研究

Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors

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