基于Copula的MEMS加速度计在振动环境下的可靠性评估

摘要

将Copula函数理论引入MEMS加速度计的可靠性评估,在考虑零偏和标度因数2个参数相关性的情况下评估MEMS加速度计在振动环境下的可靠性.首先分析了MEMS加速度计在振动环境下的失效机理和失效模式,然后结合实际情况对MEMS加速度计设计了加速退化试验方案,最后对2个退化参数的退化数据进行了相依加速退化可靠性评估.结论证明,综合考虑退化参数的相关性更加切合实际,能得到更精确的结果.%Copula function theory was introduced into the reliability evaluation of the MEMS accelerometer,and the reliability of the MEMS accelerometer was evaluated in vibration environment considering the correlation between the two parameters of zero bias and scale factor.Firstly,the failure mechanism and failure mode of the MEMS accelerometer in the vibration environment were analyzed.Then,the accelerated degradation test protocol was designed for MEMS accelerometer combined with the actual sit?uation.Finally,by analyzing the degraded data of two degradation parameters,dependent accelerated degradation reliability assess?ment was carried out.The results show that considering the correlation between the degradation parameters is more realistic and the more accurate results can be obtained.