METHOD TO DESIGN MEMS ACCELEROMETER CONSIDERING SYSTEM PARAMETER UNCERTAINTY AND MEMS ACCELEROMETER TO DESIGN THE METHOD

摘要

PURPOSE: An acceleration sensor design method of a micro electro mechanical system(MEMS) and a MEMS acceleration sensor designed using the same are provided to improve reliability and performance of the MEMS acceleration sensor. CONSTITUTION: A micro electro mechanical system(MEMS) acceleration sensor model to be designed is established. An equation of motion is derived and verified using the established model(S100). Variables of the equation of motion are established as system variables. A performance factor of a MEMS acceleration sensor is analyzed(S200). A design variable is separated from the system variables. The manufacturing yield of the MEMS acceleration sensor is estimated by considering uncertainty of the design variable which satisfies a design requirement condition(S300).