A New Method of Tunneling Accelerometer Structural Design Based on MEMS Technology

摘要

In order to solve the complex problem of accelerometer structural design, after introducing the electron tunneling effect, accelerometer structure design based on this principle is researched, and a simple, practical and new method of structural design was proposed. The operation principle and the structure dimension design method of tunneingl accelerometer as well as computation method of the system stiffness and micro micro displacement are discussed in detail, obtaining the original structure size and minimum electrode distance under certain impact acceleration environment. ANSYS software was used to carry on mode analysis and transient analysis to designed structure. Working mode shape of tunneling accelerometer was simulated and the natural frequency and the largest stress as well as the nanometer level micro displacement were shoved, proving the feasible of the tunnel accelerometer structural design method proposed.