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Optimization methods for post-bond die-internal/external testing in 3D stacked ICs

机译:3D堆叠IC中粘合后芯片内/外部测试的优化方法

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Testing of three-dimensional (3D) stacked ICs (SICs) is starting to receive considerable attention in the semiconductor industry. Since the die-stacking steps of thinning, alignment, and bonding can introduce defects, there is a need to test multiple subsequent partial stacks during 3D assembly. We address the problem of test-architecture optimization for 3D stacked ICs to minimize overall test time when either the complete stack only, or the complete stack and multiple partial stacks, need to be tested. We show that optimal test-architecture solutions and test schedules for multiple test insertions are different from their counterparts for a single final stack test. In addition, we present optimization techniques for the testing of TSVs and die-external logic in combination with the dies in the stack.
机译:三维(3D)堆叠IC(SICS)的测试开始在半导体行业中获得相当大的关注。由于稀释,对准和粘合的模具堆叠步骤可以引入缺陷,因此需要在3D组件期间测试多个后续部分堆叠。我们解决了3D堆叠IC的测试架构优化问题,以最小化仅需要测试完整堆栈或完整堆栈和多个部分堆栈的整体测试时间。我们表明,对于多个最终堆栈测试的最佳测试 - 架构解决方案和用于多个测试插入的测试计划与其不同。此外,我们提出了用于测试TSV和模具外部逻辑的优化技术与堆叠中的模具相结合。

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