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Optimization methods for post-bond die-internal/external testing in 3D stacked ICs

机译:在3D堆叠式IC中进行键合后芯片内部/外部测试的优化方法

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Testing of three-dimensional (3D) stacked ICs (SICs) is starting to receive considerable attention in the semiconductor industry. Since the die-stacking steps of thinning, alignment, and bonding can introduce defects, there is a need to test multiple subsequent partial stacks during 3D assembly. We address the problem of test-architecture optimization for 3D stacked ICs to minimize overall test time when either the complete stack only, or the complete stack and multiple partial stacks, need to be tested. We show that optimal test-architecture solutions and test schedules for multiple test insertions are different from their counterparts for a single final stack test. In addition, we present optimization techniques for the testing of TSVs and die-external logic in combination with the dies in the stack.
机译:三维(3D)堆叠式IC(SIC)的测试已开始在半导体行业引起广泛关注。由于减薄,对准和键合的管芯堆叠步骤可能会引入缺陷,因此需要在3D组装过程中测试多个后续的部分堆叠。我们解决了3D堆叠式IC的测试架构优化问题,以在仅需要测试整个堆叠或整个堆叠以及多个部分堆叠的情况下,将总测试时间降至最低。我们表明,针对多个测试插入的最佳测试体系结构解决方案和测试计划与针对单个最终堆栈测试的相应测试方案不同。此外,我们结合堆叠中的裸片,提供了用于测试TSV和裸片外部逻辑的优化技术。

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