We developed the fully-depleted thick back- illuminated CCD fabricated on N-type silicon wafer in collaboration with National Astronomical Observatory of Japan (NAOJ) for a next generation instrument for Subaru Telescope: a very wide-field CCD camera which named Hyper Suprime-Cam (HSC). The CCD format is 4-side buttable, 2k×4k 15μm square pixels with 4 low noise output amplifiers. The optimization process was successfully completed. The recent evaluation results showed the charge transfer efficiency (≫0.999995), the full-well capacity (≫150ke-), the charge conversion efficiency (5μV/e-), the low dark(≪5e-/pixel/hour at −100°C) and low noise (≪5e- at 130kHz readout, −100°C), high near-infrared QE (40% at λ=1000nm) and good surface flatness (15–20μm). Owing to the new process factory of Hamamatsu, the CCD has the good cosmetics. These results are promising for HSC which requires more than 100 CCDs.
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