Quantum efficiency modeling for a thick back-illuminated astronomical CCD

摘要

The quantum efficiency and reflectivity of thick, back-illuminated CCD's being fabricated at the Lawrence Berkeley National Laboratory for astronomical applications are modeled and compared with experiments. The treatment differs from standard thin-film optics in that (a) absorption is permitted in any film, (b) the 200-500 μm thick silicon substrate is considered as a thin film in order to observe the fringing behavior at long wavelengths, and (c) by using approximate boundary conditions, absorption in the surface films is separated from absorption in the substrate. For quantum efficiency measurements, the CCD's are normally operated as CCD's, usually at T = -140℃, and at higher temperatures, as photodiodes. They are mounted on mechanical substrates. Reflectivity is measured on air-backed wafer samples at room temperature. The agreement between model expectation and quantum efficiency measurement is in general satisfactory.