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High resolution and high quantum efficiency electron impact CCD or CMOS image sensor

机译:高分辨率和高量子效率电子碰撞CCD或CMOS图像传感器

摘要

An electron-bombarded detector for detecting low light signals includes a vacuum tube structure defining a cylindrical vacuum tube chamber, a photocathode disposed at a first end of the vacuum tube chamber, a sensor disposed at a second end of the vacuum tube chamber, ring electrodes disposed in the vacuum tube chamber for generating an electric field that accelerates emitted photoelectrons toward the sensor, and a magnetic field generator configured to generate a symmetric magnetic field that applies a focusing lens effect on the photoelectrons. The ring electrodes and magnetic field generator are operating using one of a reduced distance focusing approach and an acceleration/deceleration approach such that the photoelectrons have a landing energy below 2 keV. The use of reflective mode photocathodes is enabled using either multi-pole deflector coils, or ring electrodes formed by segmented circular electrode structures. Large angle deflections are achieved using magnetic or electrostatic deflectors.
机译:用于检测弱光信号的电子轰击检测器包括:真空管结构,其定义为圆柱形真空管腔;光电阴极,其布置在真空管腔的第一端;传感器,其布置在真空管腔的第二端;环形电极布置在真空管腔室中的用于产生使朝向传感器的发射的光电子加速的电场,以及磁场产生器,该磁场产生器被配置为产生将聚焦透镜效应施加到光电子上的对称磁场。环形电极和磁场发生器使用距离减小聚焦方法和加速/减速方法之一进行操作,以使光电子具有低于2 keV的着陆能。通过多极偏转线圈或由分段圆形电极结构形成的环形电极,可以使用反射模式的光电阴极。使用磁性或静电偏转器可实现大角度偏转。

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