首页> 外文会议>International conference on defect recognition and image processing in semiconductors >Morphological and MicroRaman Study of MBE In_xGa_(1-x)Sb / In_yAl_(1-y) Sb Heterostructures Grown on (100) GaAs Substrates
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Morphological and MicroRaman Study of MBE In_xGa_(1-x)Sb / In_yAl_(1-y) Sb Heterostructures Grown on (100) GaAs Substrates

机译:MBE in_xga_(1-x)Sb / in_yal_(1-y)Sb异质结构的形态学和微生物研究在(100)GaAs基材上生长

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The morphology and structure of In_xGa_(1-x)Sb / In_yAl_(1-y)Sb heterostructures grown by MBE on (100) GaAs substrates under either low or high Sb_4 flux are studied by means of optical microscopy and Raman spectroscopy. The texture of the surface appear, as obtained by PSM imaging, to be different for both specimens, being the surface rougher for low Sb_4 flux. Raman spectroscopy reveals different cation composition for both Sb_4 flux conditions. These observations are discussed in terms of In and Ga incorporation. Some growth defects are studied.
机译:通过光学显微镜和拉曼光谱研究了由MBE on(100)GaAs基底的MBE(100)GaAs基底生长的in_xga_(1-x)sb / in_yal_(1-y)sb异质结构的形态和结构。通过PSM成像获得的表面的纹理出现,对于两个样本不同,是低SB_4通量的表面粗纱。拉曼光谱揭示了SB_4助焊剂条件的不同阳离子组合物。这些观察结果在于和GA掺入讨论。研究了一些生长缺陷。

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