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Reliability investigations on a unique direct-tunneling-induced high performance partially-depleted SOI PMOS device

机译:独特的直接隧道诱导的高性能部分耗尽SOI PMOS器件的可靠性研究

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This paper investigates reliability of a unique direct-tunneling-induced high performance partially-depleted (PD) SOI PMOS device. For the ultra-thin gate-oxide PD SOI PMOS devices, owing to the application of the converse n/sup +/ poly-gate, the direct-tunneling mechanism can be applied to raise the floating-body potential and suppress the undesired floating-body effect. Therefore, it is important and essential to further investigate the impact of the converse n/sup +/ poly-gate on the reliability.
机译:本文研究了一种独特的直接隧穿诱导的高性能部分耗尽(PD)SOI PMOS器件的可靠性。对于超薄栅极氧化物PD SOI PMOS器件,由于应用了反向n / sup + /多晶硅栅极,因此可以采用直接隧穿机制来提高浮体电势并抑制不希望有的浮栅。身体作用。因此,进一步研究反向n / sup + /多晶硅栅极对可靠性的影响是重要且必要的。

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