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Preparation and Characterization of polycrystalline iodized mercury thick films for detector array

机译:探测器阵列多晶碘化汞厚膜的制备与表征

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The polycrystalline mercuric iodide thick-film array was deposited by hot wall physical vapor deposition (HWPVD) method using an aluminum alloy mask. The pixel size of the 4×4 array is 5×5 mm~2, and pixel spacing is about 0.2mm. Comparative study of the quality of the films grown on different pixels (type A, B, C) was conducted by Atomic force microscopy (AFM), Scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy. The results showed that films of all types were all compactly formed by separated columnar monocrystallines with uniform orientation along c-direction and had similar crystalline structures, indicating that the thick films deposited on the substrate had a good uniformity as a whole, and of all the three different type samples, type A were of the relatively highest quality.
机译:通过使用铝合金面罩通过热壁物理气相沉积(HWPVD)方法沉积多晶汞碘化物厚膜阵列。 4×4阵列的像素尺寸为5×5mm〜2,像素间隔约为0.2mm。通过原子力显微镜(AFM),扫描电子显微镜(SEM),X射线衍射(XRD)和拉曼光谱,对不同像素(A,B,C)产生的薄膜的质量进行对比研究。结果表明,所有类型的薄膜通过分离的柱状单晶,沿着C方向均匀取向并具有类似的晶体结构,表明沉积在基板上的厚膜具有良好的均匀性,以及所有的均匀性三种不同类型的样本,型型质量相对较高。

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