首页> 外文会议>Defect recognition and image processing in semiconductors 1995 >Morphological and MicroRaman Study of MBE In_xGa_(1-x)Sb / In_yAl_(1-y) Sb Heterostructures Grown on (100) GaAs Substrates
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Morphological and MicroRaman Study of MBE In_xGa_(1-x)Sb / In_yAl_(1-y) Sb Heterostructures Grown on (100) GaAs Substrates

机译:(100)GaAs衬底上生长的MBE In_xGa_(1-x)Sb / In_yAl_(1-y)Sb异质结构的形态学和显微拉曼研究

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摘要

The morphology and structure of In_xGa_(1-x)Sb / In_yAl_(1-y)Sb heterostructures grown by MBE on (100) GaAs substrates under either low or high Sb_4 flux are studied by means of optical microscopy and Raman spectroscopy. The texture of the surface appear, as obtained by PSM imaging, to be different for both specimens, being the surface rougher for low Sb_4 flux. Raman spectroscopy reveals different cation composition for both Sb_4 flux conditions. These observations are discussed in terms of In and Ga incorporation. Some growth defects are studied.
机译:通过光学显微镜和拉曼光谱研究了MBE在低或高Sb_4通量下在(100)GaAs衬底上MBE生长的In_xGa_(1-x)Sb / In_yAl_(1-y)Sb异质结构的形态和结构。通过PSM成像获得的表面纹理对于两个样品而言都不同,对于低Sb_4通量而言,表面更粗糙。拉曼光谱揭示了两种Sb_4通量条件下的阳离子组成不同。这些观察以In和Ga的结合进行讨论。研究了一些生长缺陷。

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