The MEMS resonator, the MEMS oscillating circuit and MEMS device

摘要

PROBLEM TO BE SOLVED: To provide a resonator which resonates, at at least one of the fundamental frequencies and higher harmonic wave frequencies, moreover, changes the resonance frequency, and allows excitation by a small driving voltage, as compared with the conventional technologies without using overtone technology, and to provide an oscillation circuit and a MEMS (micro-electromechanical-system) device.;SOLUTION: The MEMS resonator is provided with: a movable main beam 3 which is electrically insulated from a substrate 10, and fixed at least by one fixing end; at least one movable sub-beam 4, which is formed so as to be extended from the movable main beam 3; and at least an exciting electrode 5, which is formed so as to approach the movable sub beam 4. The movable sub beam 4 is excited by an electrostatic force for vibration to resonate at the fundamental resonance frequency, and at least one of the higher harmonic wave frequencies by making the exciting electrode 5 resonate by using an AC signal.;COPYRIGHT: (C)2010,JPO&INPIT