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The 16th International Conference on olid-State Sensors, Actuators and Microsystems

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1.Low temperature Pyrex/silicon wafer bonding via a single intermediate parylene layer

机译：通过单个中间聚对二甲苯层进行低温派热克斯/硅晶片键合
- 作者：Ciftlik A.T.;Gijs M.A.M.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- 3D integration;
- Parylene bonding;
- microfluidics;
- packaging;
2.AlN based piezoelectric force sensor for energy autonomous sensor systems

机译：用于能量自主传感器系统的基于AlN的压电力传感器
- 作者：Feili D.;Barra M.;Ziegler M.;Seidel H.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- AlN;
- Ceramic;
- Energy Autonomous Sensors;
- Force sensor;
3.A differential difference amplifier with automatic gain selection as readout interface for CMOS stress sensors in orthodontic brackets

机译：具有自动增益选择的差分差动放大器，作为正畸支架中CMOS应力传感器的读出接口
- 作者：Kuhl M.;Gieschke P.;Paul O.;Manoli Y.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- CMOS MEMS;
- DDA;
- sensor readout;
- smart bracket;
- stress sensors;
4.A CMOS compatible polycrystalline silicon-germanium based piezoresistive pressure sensor

机译：CMOS兼容的多晶硅锗基压阻式压力传感器
- 作者：Gonzalez P.;Guo B.;Severi S.;De Meyer K.;Witvrouw A.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Poly-SiGe;
- piezoresistivity;
- pressure sensor;
5.Development of a strain sensor for rolling contact loads

机译：开发用于滚动接触载荷的应变传感器
- 作者：Winkelmann C.;Woitschach O.;Meyer E.-M.;Lang W.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Roller bearing;
- Rolling contact load;
- bearing;
- sensor;
- smart bearing;
- strain sensor;
6.Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor

机译：每小时百万度Q级因子以下的硅MEMS速率传感器
- 作者：Prikhodko I.P.;Zotov S.A.;Trusov A.A.;Shke A.M.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS gyroscope;
- gyrocompassing;
- north-finding;
7.Thin film encapsulated SiGe accelerometer for MEMS above IC integration

机译：用于IC之上的MEMS的薄膜封装SiGe加速度计
- 作者：Wen L.;Guo B.;Haspeslagh L.;Severi S.;Witvrouw A.;Puers R.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Capacitive accelerometer;
- MEMS above IC;
- SiGe;
- Thin film encapsulation;
8.Ultra-high precision MEMS accelerometer

机译：超高精度MEMS加速度计
- 作者：Dong Y.;Zwahlen P.;Nguyen A. M.;Frosio R.;Rudolf F.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Accelerometer;
- MEMS;
- inertial navigation system;
- long term bias stability;
9.Photodiode with micro texture for improving sensitivity at large angle of incidence for particle sensors

机译：具有微织构的光电二极管可提高大入射角下颗粒传感器的灵敏度
- 作者：Isozaki A.;Kuwana K.;Tomimatsu Y.;Itoh T.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Inverse-tapered shape;
- Micro texture;
- Particle sensor;
- Photodiode;
10.Inductively coupled wirebonded microcoils for wireless on-chip NMR

机译：用于无线片上NMR的电感耦合引线键合微线圈
- 作者：Badilita V.;Fassbender B.;Gruschke O.;Kratt K.;Meier R.;Sakellariou D.;Korvink J.G.;Wallrabe U.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- inductive coupling;
- microcoils;
- on-chip NMR;
11.Temperature modulated excitation and phase sensitive detection to selectively image DNA sequences

机译：温度调制的激发和相敏检测可选择性地对DNA序列成像
- 作者：Zrelli K.;Cavatore E.;Barilero T.;Berthoumieux H.;Croquette V.;Le Saux T.;Jullien L.;Lemarchand A.;Gosse C.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Joule heating;
- Rate constant;
- fluorescence microscopy;
- kinetics;
- point mutation;
12.Stiction-free poly-SiGe resonators for monolithic integration of biosensors with CMOS

机译：用于生物传感器与CMOS的单片集成的无静力多晶SiGe谐振器
- 作者：Lenci S.;Pieri F.;Haspeslagh L.;De Coster J.;Decoutere S.;Maestre Caro A.;Armini S.;Witvrouw A.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Monolithic integration;
- SiGe;
- biosensors;
- resonators;
13.An all-digital, time-gated 128X128 spad array for on-chip, filter-less fluorescence detection

机译：全数字，时间门控128X128 spad阵列，用于片上无滤光片荧光检测
- 作者：Maruyama Y.;Charbon E.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- CMOS;
- Fluorescence detection;
- SPAD;
- TCSPC;
14.Bio-inspired 3D self-patterning of functional coatings for PDMS microfluidics

机译：PDMS微流控功能涂层的生物启发式3D自构图
- 作者：Wu Tianzhun;Suzuki Hiroaki;Yomo Tetsuya
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- CYTOP;
- PDMS;
- bio-inspired;
- functional coating;
- self-patterning;
- swelling;
- wettability;
15.Polymer MEMS fabrication process for self-assembled millimeter-wave on-chip antennas

机译：自组装毫米波片上天线的聚合物MEMS制造工艺
- 作者：Lee S.-W.;Parameswaran M.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Integrated antennas;
- Polymer MEMS;
- Self-assembly;
16.Development of a “Flip Glass Substrate” LED package technology for color bin yield and view angle enhancement

机译：开发“倒装玻璃基板” LED封装技术以提高色箱产量和视角
- 作者：Chang-Chien Chien-Lin;Huang Yu-Che;Yip Ming-Chuen;Fang Weileun
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- LED package;
- color control;
- glass substrate;
17.Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating

机译：通过薄的碳化硅涂层抑制循环加载的多晶硅MEMS的磨损
- 作者：Laboriante I.;Klejwa N.;Suwandi A.;Carraro C.;Howe Roger T.;Maboudian R.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS;
- polycrystalline silicon;
- silicon carbide;
- solid lubrication;
- stiction;
- wear resistance;
18.A micro electrostatic linear accelerator based on electromagnetic levitation

机译：基于电磁悬浮的微静电直线加速器
- 作者：Sari I.;Kraft M.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Electrostatic accelerator;
- contactless propulsion;
- electromagnetic levitation;
- micro fabrication;
19.Monodisperse microparticle generation from aqueous solutions

机译：从水溶液中产生单分散微粒
- 作者：Tropmann A.;Lass N.;Paust N.;Ziegler C.;Zengerle R.;Koltay P.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Mannitol;
- Polyvinylpyrrolidone;
- Spray;
- StarJet;
- microparticles;
- monodisperse;
20.Integrated thin-film piezoelectric traveling wave ultrasonic motors

机译：集成薄膜压电行波超声电机
- 作者：Smith G. L.;Rudy R. Q.;DeVoe D. L.;Polcawich R. G.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS;
- Motor;
- PZT;
- Piezoelectric;
- Ultrasonic;
21.Nano-opto-mechanical actuator driven by optical radiation force

机译：由光辐射力驱动的纳米光机械致动器
- 作者：Zhao X.;Tsai J. M.;Cai H.;Ji X. M.;Zhou J.;Bao M. H.;Huang Y. P.;Kwang D. L.;Liu A. Q.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Nano-opto-mechanical Systems (NOMS);
- actuators;
- optical force;
22.Disposable microfluidic vacuum modules using inductively-triggered transformative polymers for point-of-care diagnostics

机译：使用感应触发的转化聚合物的一次性微流体真空模块，用于即时诊断
- 作者：Hong Chien-Chong;Tsai Cheng-Han;Chen Szu-Ying;Chen Chie-Pein
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- induction heating;
- point-of-care microfluidics;
- shape memory polymer;
- vacuum modules;
23.A hybrid vertical comb-drive actuator supported by flexible pdms suspensions

机译：混合式垂直梳齿驱动执行器，由柔性PDMS悬架支撑
- 作者：Lee M.;Chen Y.-C.;Chang C.;Hou M.;Chen R.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Heterogeneous vertical;
- Hybrid MEMS;
- PDMS;
- comb-drive actuator;
24.Silicon linkage with novel compliant mechanism for piezoelectric actuation of an intraocular implant

机译：具有新颖顺应性机制的硅键合，用于眼内植入物的压电驱动
- 作者：Martin Th.;Gengenbach U.;Ruther P.;Paul O.;Bretthauer G.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
25.Thermally-actuated high speed droplet manipulation platform

机译：热驱动高速液滴操纵平台
- 作者：Yakhshi-Tafti E.;Kumar R.;Cho H. J.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Droplet manipulation;
- Thermocapillary effect;
26.Nano-electromechanical storage element for a low power complimentary logic architecture using PZT relays

机译：使用PZT继电器的低功耗互补逻辑架构的纳米机电存储元件
- 作者：Proie Robert M.;Polcawich Ronald G.;Pulskamp Jeffrey S.;Ivanov Tony;Zaghloul Mona
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
27.Three-axis tactile display using PDMS pneumatic actuator for robot-assisted surgery

机译：使用PDMS气动执行器的三轴触觉显示器，用于机器人辅助手术
- 作者：Doh Eunhyup;Lee Hyungkew;Park Joonah;Yun Kwang-Seok
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Tactile display;
- pneumatic actuator;
- shear force;
28.Batch fabricated bidirectional dielectric elastomer actuators

机译：批量制造的双向介电弹性体执行器
- 作者：Gerratt Aaron P.;Balakrisnan Bavani;Penskiy Ivan;Bergbreiter Sarah
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- actuator;
- dielectric;
- elastomer;
- polydimethylsiloxane;
29.Novel tweezers using acoustically oscillating twin bubbles

机译：使用声振动双气泡的新型镊子
- 作者：Lee K. H.;Lee J. H.;Won J. M.;Chung S. K.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Cavitational microstreaming flow;
- Microbubble;
- Micromanipulation;
30.A drug-injection system with chemo-mechanical energy conversion for active feedback control of glucose concentration in a blood

机译：具有化学机械能转换的药物注射系统，用于主动反馈控制血液中的葡萄糖浓度
- 作者：Arakawa Takahiro;Kato Ryodai;Munkhjargal Munkhjargal;Takahashi Daishi.;Kudo Hiroyuki;Mitsubayashi Kohji
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Energy conversation;
- blood sugar;
- controlling glucose concentration;
- drug release system;
31.Microfluidic actuators based on infrared-light responsive PNIPAAm hydrogel nanocomposite incorporating graphene-oxide

机译：基于红外光响应PNIPAAm水凝胶纳米复合材料的微流体驱动器
- 作者：Lo Chi-Wei;Zhu Difeng;Jiang Hongrui
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Graphene oxide;
- Hydrogel;
- Microactuator;
- Microfluidics;
- Microvalve;
- Tunable liquid microlens;
32.Light-directed migration of D. discoideum slugs in microchannels

机译：D. Discoideum ug在微通道中的光定向迁移
- 作者：Kim J.;Ennis H.;Nguyen T.;Kessin R.;Stojanovic M.;Lin Q.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Dictyostelium discoideum;
- microactuators;
- microchannels;
- phototaxis;
- slug;
33.A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument

机译：集成了尖锐尖端和大挠度曲柄滑块结构悬臂的功能性微探针，适用于多功能仪器
- 作者：Chen X.;Lee D.W.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Huge deflection;
- Microcantilever;
- Microprobe;
34.Ni-based microvalves for flow modulation: Toward active combustion control

机译：镍基微阀用于流量调节：朝主动燃烧控制
- 作者：Chang C.W.;Okojie R.S.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Microvalve;
- Ni;
- combustion control;
- diaphragm;
- finite element analysis;
- microactuator;
35.Efficient electrostatic inchworm motors with simple control and high force density

机译：高效的静电蠕虫电机，控制简单，力密度高
- 作者：Penskiy Ivan;Gerratt Aaron P.;Bergbreiter Sarah
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Electrostatic;
- flexible arm;
- gap closing actuator;
- inchworm;
36.Chemical switching of jellyfish-shaped micro robot consisting only of cardiomyocyte gel

机译：仅由心肌细胞凝胶组成的水母状微型机器人的化学转换
- 作者：Takemura R.;Akiyama Y.;Hoshino T.;Morishima K.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Bio-actuator;
- Chemical stimulation;
- Collagen gel;
37.Active CMOS-MEMS conductive probes and arrays for tunneling-based atomic-level surface imaging

机译：用于基于隧道的原子级表面成像的有源CMOS-MEMS导电探针和阵列
- 作者：Zhang Y.;Wang J.;Santhanam S.;Fedder G. K.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- CMOS MEMS;
- SPM;
- probe array;
- thermal actuation;
38.Resonant stator actuation of gear coupled Ultrasonic Motors

机译：齿轮耦合超声电机的定子谐振致动
- 作者：Piratla S.;Lal A.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Micromotor;
- Piezoelectric;
- Ultrasonic;
39.All-electric peristaltic vacuum pump utilizing electromagnetic and hydraulic actuation with a highly flexible latex membrane

机译：全电磁蠕动真空泵，利用电磁和液压驱动以及高度柔性的乳胶膜
- 作者：Kim Hyun Tae;Park Jung Woo;Kim Hanseup
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Vacuum pump;
- electromagnetic actuation;
- gas pump;
- hydraulic focusing;
- latex membrane;
40.Capacitive frequency tuning of ALN micromechanical resonators

机译：ALN微机械谐振器的电容频率调谐
- 作者：Kim B.;Olsson R.H.;Wojciechowski K.E.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- RF MEMS;
- aluminum nitride;
- resonator;
- tuning;
41.Influence of the A-F effect on the temperature stability of silicon micromechanical resonators

机译：A-F效应对硅微机械谐振器温度稳定性的影响
- 作者：Lee H.K.;Melamud R.;Chandorkar S.A.;Qu Y.Q.;Salvia J.C.;Kim B.;Hopcroft M.A.;Kenny T.W.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- A-f effect;
- oscillator;
- resonator;
- temperature stability;
42.Verification of the phase-noise model for MEMS oscillators operating in the nonlinear regime

机译：验证在非线性状态下工作的MEMS振荡器的相位噪声模型
- 作者：Lee H.K.;Ward P.A.;Duwel A.E.;Salvia J.C.;Qu Y.Q.;Melamud R.;Chandorkar S.A.;Hopcroft M.A.;Kim B.;Kenny T.W.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- nonlinearity;
- oscillator;
- phase noise;
- resonator;
43.Encapsulated mechanically coupled fully-differential breathe-mode ring filters with ultra-narrow bandwidth

机译：具有超窄带宽的封装式机械耦合全差分呼吸模式环形滤波器
- 作者：Wang S.;Chandorkar S. A.;Graham A. B.;Messana M. W.;Salvia J.;Kenny T.W.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Breathe-mode ring;
- Encapsulation;
- Ultra-narrow bandwidth;
44.Micro disk resonator with on-disk piezoelectric thin film transducers for integrated MEMS ubiquitous applications

机译：具有集成压电MEMS应用的磁盘压电薄膜换能器的微型磁盘谐振器
- 作者：Lu J.;Zhang Y.;Itoh T.;Maeda R.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS;
- PZT;
- disk resonator;
- piezoelectric transducer;
- quality-factor;
- wireless sensor network;
45.Novel MEMS oscillator using in-plane disk resonator with sensing platform and its mass sensing characteristics

机译：具有感测平台的面内圆盘谐振器的新型MEMS振荡器及其质量感测特性
- 作者：Konno M.;Ikehara T.;Murakami S.;Maeda R.;Kimura M.;Fukawa T.;Mihara T.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Annular disk resonator;
- MEMS Oscillator;
- Mass sensing;
- Motional impedance;
- Sensing platform;
46.An EWOD driven millimeter-wave phase shifter using a movable ultrasoft metalized PDMS ground plane

机译：使用可移动的超软金属化PDMS接地层的EWOD驱动的毫米波移相器
- 作者：Hage-Ali Sami;Tiercelin Nicolas;Lapierre Florian;Orlic Yovan;Harnois Maxime;Thomy Vincent;Preobrazhensky Vladimir;Pernod Philippe;Coquet Philippe
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- EWOD;
- PDMS membrane;
- Phase shifter;
47.Novel frequency agile electromagnetic decoupling MEMS device

机译：新型频率捷变电磁去耦MEMS器件
- 作者：Jang Yun-Ho;Llamas-Garro Ignacio;Kim Jung-Mu;Kim Yong-Kweon
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Electromagnetic decoupling;
- RF MEMS;
- comb actuator;
- filter;
- half-wavelength resonator;
48.Battery-free wireless touch driven transmitter with on-chip antennas for wireless sensor systems

机译：带电池的无电池无线触摸驱动发射器，用于无线传感器系统
- 作者：Niino Makoto;Nguyen Tuan-Anh;Lee Wang-Hoon;Sawada Kazuaki;Ishida Makoto
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
49.Piezoelectric ALN MEMS resonators with high coupling coefficient

机译：具有高耦合系数的压电ALN MEMS谐振器
- 作者：Khine Lynn;Soon Jeffrey B.W.;Tsai Julius M.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Bulk acoustic wave;
- RF-MEMS;
- micromechanical;
- piezoelectric resonators;
50.Spontaneous oscillation due to charging effect in MEMS RF switches

机译：MEMS RF开关中的充电效应导致自发振荡
- 作者：Chen Y.-C.;Ishida T.;Toshiyoshi H.;Chen R.;Fujita H.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS-opposing-tip device;
- Qucs equivalent circuit model;
- RF MEMS switch;
- Spontaneous oscillation;
51.Wideband tunable love wave filter using electrostatically-actuated MEMS variable capacitors integrated on lithium niobate

机译：使用集成在铌酸锂上的静电驱动MEMS可变电容器的宽带可调爱波滤波器
- 作者：Yasue T.;Komatsu T.;Nakamura N.;Hashimoto K.;Hirano H.;Esashi M.;Tanaka S.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Love wave;
- SAW filter;
- Tunable filter;
- Variable capacitor;
52.Very high frequency double-ended tuning fork nano-mechanical Fin-FET resonator

机译：超高频双音叉纳米机械Fin-FET谐振器
- 作者：Bartsch S.T.;Grogg D.;Lovera A.;Tsamados D.;Ionescu A.M.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Tuning fork;
- electromechanical frequency conversion;
- mixing;
- nanomechanical;
- resonant-body transistor;
- resonator;
53.Synchronized oscillation in micro mechanically coupled opposite C-shaped cantilever-based oscillator system

机译：微型机械耦合对立的C形悬臂基振荡器系统中的同步振荡
- 作者：Nakajima Mamoru;Wang Dong F.;Ikehara Tsuyoshi;Maeda Ryutaro
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Beam-shaped;
- Doubling frequency response;
- Frequency ratio;
- Opposite C-shaped;
- Synchronization;
54.3-D microcoils as a metamaterial with electric and magnetic response

机译：3-D微线圈作为具有电磁响应的超材料
- 作者：Kratt K.;Waselikowski S.;Badilita V.;Wallrabe U.;Walther M.;Korvink J. G.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- metamaterial;
- microcoil;
- terahertz;
- wire bonding;
55.RF MEMS switches integrated with sealed suspended coplanar waveguides for reconfigurable RF circuits

机译：集成了密封悬浮共面波导的RF MEMS开关，用于可重构RF电路
- 作者：Kuwabara K.;Takagahara K.;Morimura H.;Sato Y.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Coplanar waveguide;
- Integration;
- RF MEMS;
- Sealing;
- Suspension;
- Switch;
56.High-Q, large-stopband-rejection integrated CMOS-MEMS oxide resonators with embedded metal electrodes

机译：具有嵌入式金属电极的高Q，大阻带抑制集成CMOS-MEMS氧化物谐振器
- 作者：Liu Yu-Chia;Tsai Ming-Han;Chen Wen-Chien;Li Sheng-Shian;Fang Weileun
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- CMOS-MEMS;
- High selectivity;
- High-Q;
- Integration;
- Metal release;
- Oxide resonator;
57.Piezoelectric micro-scale tuning fork resonators for sensing applications

机译：用于传感应用的压电微型音叉谐振器
- 作者：Gil M.;Manzaneque T.;Hernando-Garcia J.;Ababneh A.;Seidel H.;Sanchez-Rojas J. L.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
58.CMOS-MEMS transverse-mode square plate resonator with high Q and low motional impedance

机译：高Q低运动阻抗的CMOS-MEMS横模方板谐振器
- 作者：Li Ming-Huang;Chen Wen-Chien;Li Sheng-Shian
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- CMOS-MEMS;
- Composite Structure;
- Motional Impedance;
- Quality Factor;
- RF MEMS;
- Resonator;
59.A tunable laser using double-ring resonator external cavity via free-carrier dispersion effect

机译：利用双环谐振器外腔通过自由载流子色散效应产生的可调谐激光器
- 作者：Ren M.;Cai H.;Tsai J. M.;Zhu W. M.;Kwong D. L.;Liu A. Q.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS;
- Tunable laser;
- double-ring resonator;
- external cavity;
60.One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-Silicon micromechanical resonators

机译：一维线性声带隙结构，用于增强硅上AlN谐振器的性能
- 作者：Sorenson L.;Fu J. L.;Ayazi F.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Phononic crystal;
- acoustic bandgap;
- one-dimensional;
- piezoelectric-on-silicon resonator;
- quality factor;
- support loss;
61.Dry etching method using double-layered etching mask for modulating shape of deep-etched quartz surface

机译：利用双层刻蚀掩模调制深蚀石英表面形状的干法刻蚀方法
- 作者：Abe T.;Itasaka Y.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- 3D quartz MEMS;
- DRIE;
- Resonator;
62.Quality factor enhancement in lamb wave resonators utilizing AlN plates with convex edges

机译：利用具有凸边的AlN板增强兰姆波谐振器的品质因数
- 作者：Lin Chih-Ming;Lai Yun-Ju;Yen Ting-Ta;Hsu Jin-Chen;Chen Yung-Yu;Senesky Debbie G.;Pisano Albert P.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Lamb wave resonators;
- RF MEMS;
- aluminum nitride (AlN);
- convex edges;
- energy loss;
- piezoelectric resonators;
- quality factor (Q);
- tether loss;
63.A state-converting inline RF MEMS power sensor using GaAs MMIC technology

机译：使用GaAs MMIC技术的状态转换串联RF MEMS功率传感器
- 作者：Zhang Zhiqiang;Liao Xiaoping;Han Lei
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- GaAs MMIC;
- Microwave power measurement;
- RF MEMS;
- State conversion;
64.Laterally-excited silicon bulk acoustic resonators with sidewall AlN

机译：具有侧壁AlN的横向激励硅体声谐振器
- 作者：Tabrizian R.;Ayazi F.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
65.Lorentz force transduction for RF micromechanical filters

机译：射频微机械滤波器的洛伦兹力传递
- 作者：Forouzanfar S.;Mansour R. R.;Abdel-Rahman E. M.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Lorentz force;
- MEMS;
- Micromechanical resonator;
- RF filter;
- electrodynamic;
- transduction;
66.Opto-acoustic oscillator using silicon MEMS optical modulator

机译：使用硅MEMS光调制器的光声振荡器
- 作者：Sridaran Suresh;Bhave Sunil A.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS based Optical Modulator;
- Opto-Acoustic Oscillator;
- Optomechanics;
- RF MEMS resonator;
67.Reliable low-cost fabrication and characterization methods for micromechanical disk resonators

机译：微机械盘谐振器的可靠低成本制造和表征方法
- 作者：Xie J.;Liu Y. F.;Zhao H.;Yang J. L.;Yang F. H.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Disk resonator;
- differential readout;
- electrochemical corrosion;
- notch filter;
- polysilicon;
68.A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

机译：抗蠕变RF-MEMS可调电容器的长期可靠性分析
- 作者：Ogawa Etsuji;Masunishi Kei;Ikehashi Tamio;Saito Tomohiro;Yamazaki Hiroaki;Tomizawa Yasushi;Sugizaki Yoshiaki
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Norton's law;
- RF-MEMS;
- brittle material;
- creep;
- electrostatic actuator;
- tunable capacitor;
69.Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device

机译：单个微机电设备中的电压可编程双带通/带阻滤波器响应
- 作者：Zou X.;Yan J.;Seshia A. A.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- dual-band filter;
- resonators;
- voltage programmability;
70.Electrothermally actuated RF MEMS capacitive switch with atomic layer deposited (ALD) dielectrics

机译：具有原子层沉积（ALD）电介质的电热驱动RF MEMS电容开关
- 作者：He X.J.;Lv Z.Q.;Liu B.;Li Z.H.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Atomic layer deposition (ALD);
- Electrothermally actuation;
- MEMS capacitive switch;
71.Differential-input piezoresistively-sensed square-extensional mode resonator for parasitic feedthrough cancellation

机译：差分输入压阻式方扩展模式谐振器，用于消除寄生馈通
- 作者：Xu Y.;Lee J. E.-Y.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS resonator;
- feedthrough cancellation;
- passive differential drive;
- piezoresistive sensing;
72.Different stiction mechanisms in electrostatic MEMS devices: Nanoscale characterization based on adhesion and friction measurements

机译：静电MEMS器件中的不同静摩擦机制：基于附着力和摩擦力测量的纳米级表征
- 作者：Zaghloul U.;Bhushan B.;Pons P.;Papaioannou G.;Coccetti F.;Plana R.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Stiction;
- adhesive force;
- dielectric charging;
- electrostatic MEMS;
- field-induced meniscus;
- friction force;
73.Millimeter-wave filter using novel micromachined substrate integrated waveguide structure with embedded silicon vias in BCB dilectrics

机译：使用新型微加工基片集成波导结构和BCB电介质中嵌入的硅通孔的毫米波滤波器
- 作者：Hyeon Ik-Jae;Park Woo-Young;Lim Sungjoon;Baek Chang-Wook
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
74.On-chip RF inductors with magnetic nano particles medium

机译：具有磁性纳米粒子介质的片上RF电感器
- 作者：Yang C.;Koh K.;Zhu X.;Lin L.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Inductor;
- Magnetic Medium;
- Nano Particle;
- RF-MEMS;
75.High performance bulk mode gallium nitride resonators and filters

机译：高性能体模氮化镓谐振器和滤波器
- 作者：Gokhale V.J.;Roberts J.;Rais-Zadeh M.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Gallium nitride;
- bulk mode filters;
- contour mode resonators;
- effective piezoelectric coupling coefficient;
76.A 1.75 GHz piezoelectrically-transduced SiC lateral overmoded bulk acoustic-wave resonator

机译：1.75 GHz压电换能SiC横向过调制体声波谐振器
- 作者：Gong Songbin;Kuo Nai-Kuei;Piazza Gianluca.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- AlN;
- LOBAR;
- MEMS resonators;
- SiC;
- piezoelectric;
77.Engineering of acoustic metamaterials with application to MEMS BAW resonators

机译：声学超材料工程及其在MEMS BAW谐振器中的应用
- 作者：Rottenberg X.;Jansen R.;Verheyen P.;Van Hoof R.;Verbist A.;Tilmans H.A.C.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- BAW;
- MEMS;
- acoustic;
- metamaterials;
- resonator;
78.Ultra high frequency phononic crystal in silicon carbide

机译：碳化硅中的超高频声子晶体
- 作者：Kuo N.;Gong S.;Piazza G.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Acoustic Band Gap;
- Fractal;
- Phononic Band Gap;
- Phononic Crystal;
- Ultra High Frequency;
79.Independent tuning of quality factor and resonant frequency of torsional micro-resonators for timing and sensing applications

机译：针对时序和感测应用，独立调整扭转微谐振器的品质因数和谐振频率
- 作者：Rasouli M.A.;Bahreyni B.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Anchor loss;
- MEM-resonators;
- Quality factor control;
80.Mode-selective optical filtering and wavelength-selective switching through Fabry-Perot cavity with cylindrical reflectors

机译：通过带圆柱反射器的Fabry-Perot腔进行模式选择的光学滤波和波长选择的切换
- 作者：Malak M.;Pavy N.;Marty F.;Bourouina T.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
81.Speckle reduction in laser displays using a MEMS tandem modulator

机译：使用MEMS串联调制器减少激光显示器中的斑点
- 作者：Ouyang G. M.;Tong Z. M.;Akram M. N.;Kartashov V.;Wang K. Y.;Chen X. Y.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Laser display;
- MOEMS;
- Speckle reduction;
82.Interferometric modulators using mechanically coupled mirror actuators for color reproduction

机译：使用机械耦合镜致动器的干涉式调制器用于色彩再现
- 作者：Han W.;Cho Y.-H.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Interferometric modulator;
- color display;
- mirror;
83.A novel electromagnetic microactuator with lateral magnetio-static force for scanning micromirror device

机译：用于扫描微镜装置的具有横向静磁力的新型电磁微致动器
- 作者：Lai Tenghsien;Tsou Chingfu
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Electromagnetic microactuator;
- Micromirror;
- Vacuum;
84.Micromachined array-type Mirau interferometer for MEMS metrology

机译：MEMS计量用微机械阵列型Mirau干涉仪
- 作者：Gorecki C.;Bargiel S.;Albero J.;Passilly N.;Rousselot C.;Zeitner U.;Gastinger K.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- DOE;
- MEMS metrology;
- Mirau interferometer;
- beam-splitter;
- glass reflow;
- lenses;
- low-coherence interferometry;
85.A thermal tunable bulk-micromachined optical filter

机译：热可调体微机械滤光片
- 作者：Li Sihua;Zhong Shaolong;Xu Jing;Wu Yaming
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Bulk-micromachined;
- Fabry-Perot;
- MEMS;
- Thermal;
- Tunable optical filter;
86.Micro-mirrors connected in series for loss-mechanism study and low-voltage operation

机译：串联微镜，用于损耗机理研究和低压操作
- 作者：Kotani S.;Chu H.M.;Sasaki T.;Hane K.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Micro-mirror;
- energy loss;
- mechanical coupling;
87.A micromachined optical delay line by switchable metamaterials

机译：可切换超材料的微加工光学延迟线
- 作者：Zhu W. M.;Tao J. F.;Teng J. H.;Zhang X. H.;Tanoto H.;Guo H. C.;Wu Q. Y.;Bourouina T.;Liu A. Q.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Micro-electro-mechanical system (MEMS);
- Switchable metamaterials;
- optical delay line;
88.Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror

机译：高性能2D扫描MEMS微镜的设计，制造和真空封装工艺
- 作者：Chu H.M.;Sasaki T.;Hane K.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- 2D MEMS micromirror;
- air damping;
- and vacuum package process;
89.A novel dual screen projection system using balance-type micromirror with piezoelectric actuator

机译：使用带有压电致动器的平衡型微镜的新型双屏投影系统
- 作者：Shih M.T.;Shen S.C.;Chang S.J.;Huang H. J.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- LIGA-like;
- dual screen projection system;
- micro-mirror;
- piezoelectric actuator;
90.Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy

机译：用于太空天文学的新型超轻量和高分辨率MEMS X射线光学器件
- 作者：Mitsuishi I.;Ezoe Y.;Ishizu K.;Moriyama T.;Mita M.;Yamasaki N. Y.;Mitsuda K.;Horade M.;Sugiyama S.;Riveros R.;Yamaguchi H.;Kanamori Y.;Morishita K.;Nakajima K.;Maeda R.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS;
- X-ray;
- optics;
- space astronomy;
91.Varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer

机译：由绝缘体上硅晶片制成的可变扫描微镜
- 作者：Sasaki T.;Hane K.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Scanning micro-mirror;
- Silicon-on-insulator wafer;
- Varifocal mirror;
92.Electrostatic torsional vertical flaps for reflective MEMS display

机译：用于反射式MEMS显示器的静电扭转垂直襟翼
- 作者：Jutzi F.;Noell W.;de Rooij N. F.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- electrostatic actuation;
- low voltage;
- micromirror;
- reflective display;
- shutter;
93.Metal-based piezoelectric MEMS scanner mirrors composed of PZT thin films on titanium substrates

机译：在钛基板上由PZT薄膜组成的基于金属的压电MEMS扫描仪镜
- 作者：Matsushita Shuhei;Kanno Isuku;Yokokawa Ryuji;Kotera Hidetoshi
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- MEMS scanner mirror;
- PZT thin films;
- piezoelectric actuator;
- sputtering;
94.Process optimization and performance analysis of an electrostatically actuated varifocal liquid lens

机译：静电驱动变焦液体透镜的工艺优化和性能分析
- 作者：Pouydebasque A.;Bolis S.;Bridoux C.;Jacquet F.;Moreau S.;Sage E.;Saint-Patrice D.;Bouvier C.;Kopp C.;Sillon N.;Fanget S.;Vigier-Blanc E.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Liquid lens;
- electrostatic actuation;
- variable-focus lens;
95.On-chip optical power measurement by optical force

机译：通过光力进行片上光功率测量
- 作者：Tao J. F.;Cai H.;Yu A. B.;Zhu W. M.;Zhang Q. X.;Wu J.;Xu K.;Lin J. T.;Lo G. Q.;Kwong D. L.;Liu A. Q.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Optical detection;
- on-chip measurement;
- optical force;
- tunneling sensor;
96.A Nano-opto-mechanical pressure sensor

机译：纳米光机械压力传感器
- 作者：Zhao X.;Tsai J. M.;Cai H.;Ji X. M.;Zhou J.;Bao M. H.;Huang Y. P.;Kwang D. L.;Liu A. Q.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Nano-opto-mechanical systems (NOMS);
- optical force;
- ring resonator;
97.Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

机译：中空MOEMS布拉格光栅麦克风，用于分布式和遥感
- 作者：Reck K.;Ostergaard C.;Thomsen E. V.;Hansen O.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Bragg grating;
- Optical sensing;
- frequency modulation;
- microphone;
98.2D imaging with 1D LED array integrated FR4 actuator

机译：1D LED阵列集成FR4执行器进行2D成像
- 作者：Gokdel Y.D.;Sarioglu B.;Yalcinkaya A.D.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Display;
- Electromagnetic actuation;
- Light-emitting diode;
99.Microfabrication and packaging of a Rubidium vapor cell as a plasma light source for MEMS atomic clocks

机译：vapor蒸气电池的微制造和封装，作为MEMS原子钟的等离子光源
- 作者：Venkatraman V.;Petremand Y.;Affolderbach C.;Mileti G.;de Rooij N.;Shea H.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Plasma light source;
- anodic bonding;
- chip-scale atomic clocks;
- rubidium;
100.Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors

机译：用于制造高度小型化的光纤超声检测器的微光机械技术
- 作者：Belsito L.;Mancarella F.;Ferri M.;Roncaglia A.;Biagi E.;Cerbai S.;Masotti L.;Masetti G.;Speciale N.
- 会议名称：《The 16th International Conference on olid-State Sensors, Actuators and Microsystems》 | 2011年
- Fabry-Perot;
- Fiber Optic;
- Laser;
- MOMS;
- Ultrasound;