SUBSTRATE LOAD-LOCK DEVICE

摘要

A substrate load-lock device (100) for uploading substrate from substrate cassette (50) to semiconductor production line is provided. The substrate load-lock device (100) comprises a vacuum chamber (10), a vacuum control mechanism (20), a substrate cassette carrier (30) and an elevator (40).The vacuum chamber (10) is provided with a substrate inlet (11), a substrate outlet (12) and a vent hole (13). A seal door (14) is mounted at the substrate inlet and an outlet valve (15) is mounted at the substrate outlet (12). The vacuum control mechanism (20) comprises a vacuum pipe (21), a vacuum gauge (22) and a vacuum valve (23). One end of the vacuum pipe (21) is connected to the vent hole (13); the other end is connected with a vacuum pumping system and an air inflation system. The vacuum gauge (22) and the vacuum valve (23) are installed on the vacuum pipe (21). The substrate cassette carrier (30) is located in the vacuum chamber (10) and comprises a fixing pad (31) and a detection unit (32). An outlet shaft (42) of the elevator (40) penetrates through the vacuum chamber (10) in an airtight way to fixedly connect with the substrate cassette carrier (30) and controls the substrate cassette carrier (30) to perform an up-and-down motion.