CLUSTER BEAM GENERATOR, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATION METHOD AND SUBSTRATE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a cluster beam synthesizer which can control the ratio of a cluster of liquid material and a cluster of gas material easily.;SOLUTION: A cluster beam generator 10 generating a cluster beam 26 comprises a mixer 40 which mixes a gas material and a liquid material, a nozzle 21 which supplies the gas material and the liquid material mixed in the mixer 40 as a cluster, and a temperature control unit 23 which controls temperature of the nozzle 21. When the temperature control unit 23 changes temperature of the nozzle, the ratio of a cluster of the liquid material and a cluster of the gas material in the cluster is adjusted.;COPYRIGHT: (C)2012,JPO&INPIT