in the cluster, and the liquid raw material gas of the raw material easily cluster beam generation apparatus which can control the rate of cluster provides . In the cluster beam generator for generating a cluster beam , a mixer for mixing gas and liquid raw material , and a nozzle for supplying the raw material gas and the liquid raw material mixed in the mixer as a cluster , of adjusting the temperature of the nozzle has a temperature regulating section , by providing the cluster beam generating device , characterized by adjusting the ratio of the cluster and the cluster of the base material of the liquid raw material in by , the cluster changing the temperature of the nozzle by the temperature regulating section to solve the problem .
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