'Robot Systems, Apparatus, and Methods Adapted to Process Substrates in Multiple Tiers' in Patent Application Approval Process

摘要

In addition to the background information obtained for this patent application, VerticalNews journalists also obtained the inventors' summary information for this patent: "In one aspect an electronic device processing system is provided. The system includes a transfer chamber, a first group of process chambers arranged at a first lower elevation, a second group of process chambers arranged at a second upper elevation above the first elevation, and a robot apparatus received in the transfer chamber and adapted to transport substrates to both the a first group of process chambers and the second group of process chambers.