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Gas-Cluster Ion-Beam Smoothing of Chemo-Mechanical- Polish Processed GaSb(100) Substrates

机译：化学 - 机械 - 波兰处理的Gasb（100）衬底的气体团簇离子束平滑

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W. D. Goodhue; D. Bliss; M. Tabat; K. S. Jones; G. Dallas; D. Bakken; C. Sung;
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年度 2003
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1. Gas-Cluster Ion-Beam Smoothing of Chemo-Mechaical-Polish Processed GaSb(100) Substrates [J] . L.P. Allen, T.G. Tetreault, C. Santeufemio, Journal of Electronic Materials . 2003,第8期

机译：化学机械抛光GaSb（100）基板的气团离子束平滑
2. Epitaxial growth on gas cluster ion-beam processed GaSb substrates using molecular-beam epitaxy [J] . Krishnaswami K, Vangala SR, Zhu B, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2004,第3期

机译：使用分子束外延在气体团簇离子束处理的GaSb衬底上外延生长
3. Surface smoothing of single-crystal diamond (100) substrate by polishing technique [J] . Akihisa Kubota, Sakae Fukuyama, Yuya Ichimori Diamond and Related Materials . 2012,第Null期

机译：通过抛光技术对单晶金刚石（100）基板进行表面平滑
4. Roughness Analysis of Episurfaces Grown on Ion-Beam Processed GaSb Substrates [C] . K. Krishnaswami, D. B. Fenner, S. R. Vangala, Symposium on Progress in Compound Semiconductor Materials-Electronic and Optoelectonic Applications . 2005

机译：离子束加工气体基板上生长的术术的粗糙度分析
5. Reducing Threading Dislocation in GaSb Epilayer Grown on GaAs Substrate for Photovoltaic and Thermophotovoltaic Application [D] . Mansoori, Ahmad. 2019

机译：减少在GaAs底物上生长在GaAs底物上的喘气脱位，用于光伏和蒸煮器应用
6. The structural and optical properties of GaSb/InGaAs type-II quantum dots grown on InP (100) substrate [O] . Zhang Shuhui, Wang Lu, Shi Zhenwu, 2012

机译：在InP（100）衬底上生长的GaSb / InGaAs II型量子点的结构和光学性质
7. Defect Filtration of Hollow Pyramidal Structured GaSb Epilayers Grown on GaSb (100) Patterned Substrates by Liquid Phase Epitaxy [O] . Hayakawa, Yasuhiro, Kumagawa, Masashi, Zhang, Cuoqiang, 2003

机译：GaSb（100）图案化衬底上生长的空心金字塔形GaSb外延层的液相外延缺陷过滤
8. X-ray diffraction study of GaSb/AlSb strained-layer-superlattices grown on miscut (100) substrates [R] . Macrander, A. T., Schwartz, G. P., Guiltieri, G. J., 1991

机译：在错切（100）衬底上生长的Gasb / alsb应变层超晶格的X射线衍射研究

Gas-Cluster Ion-Beam Smoothing of Chemo-Mechanical- Polish Processed GaSb(100) Substrates

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