NANOSCALE PROCESSING BY GAS CLUSTER ION BEAMS: NOVEL TECHNIQUE IN ION BEAM PROCESSING

摘要

Gas cluster ion beam techniques have been developed for nanoscale surface processing. Bombarding process fundamentals are distinctly different than those produced by conventional monomer ion irradiation. The unique characteristics of gas cluster ion bombardment are low energy and high current effects. Multiple collision during the bombardment solid surface produces complicate nonlinear effects. Very shallow ion implantation, low damage and high rate lateral sputtering and low temperature thin film formation are suggested application fields and have been experimentally demonstrated.