A method (200) and system are described for optically determining a substantially fully activated doping profile. The substantially fully activated doping profile thereby is characterized by a set of physical parameters. The method (200) comprises obtaining a sample comprising a fully activated doping profile and a reference and obtaining (210, 230) photomodulated reflectance (PMOR) offset curve measurement data and DC reflectance measurement data for said sample comprising the fully activated doping profile and for said reference. The method also comprises determining (220, 240) values for the set of physical parameters of the doping profile based on both the photomodulated reflectance offset curve measurements and the DC reflectance measurements.
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