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METHOD FOR MANUFACTURING AN INTEGRATED CIRCUIT COINTEGRATING A FET TRANSISTOR AND A MEMORY POINT OXRAM

机译:制造集成电路的方法将FET晶体管和存储点OXRAM集成在一起

摘要

The invention relates to a method of manufacturing an integrated circuit (1), comprising the steps of: -providing a substrate (100), the substrate being provided with first and second dummy grids and an encapsulation layer (106); ); removing the first and second dummy gates to provide first and second grooves (23,33) in said encapsulation layer (106); simultaneously depositing a layer of gate insulator (107) at least in the bottom of the first groove and on a side wall of the second groove; -forming a gate electrode of said transistor (2) in the first groove, forming source and drain electrodes of said transistor on either side of said gate electrode, forming first and second electrodes of said memory cell from and other of said gate insulator layer deposited on a side wall of the second groove.
机译:本发明涉及一种制造集成电路(1)的方法,该方法包括以下步骤:-提供衬底(100),该衬底设置有第一和第二虚设栅极以及封装层(106);以及);去除第一和第二伪栅极以在所述封装层(106)中提供第一和第二凹槽(23,33);同时至少在第一凹槽的底部和第二凹槽的侧壁上沉积一层栅极绝缘体(107); -在第一凹槽中形成所述晶体管(2)的栅电极,在所述栅电极的任一侧上形成所述晶体管的源电极和漏电极,由沉积的所述栅绝缘层和另一层形成所述存储单元的第一和第二电极在第二凹槽的侧壁上。

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