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Bias Sputter Deposition of Pd-Au-Si and Pd-Si: Composition and Thermal Behavior

机译：pd-au-si和pd-si的偏压溅射沉积：成分和热行为

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作者
Rosenblum, M. P.; Turnbull, D.;
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年度 1979
页码 p.1-18
总页数 18
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Palladium alloys; Gold alloys; Silicon alloys; Sputtering; Chemical composition; Thermal properties; Reprints;

机译：钯合金;金合金;硅合金;溅射;化学成分;热性能;重印;

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Bias Sputter Deposition of Pd-Au-Si and Pd-Si: Composition and Thermal Behavior

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