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Misfit strain and misfit dislocations in lattice mismatched epitaxial layers and other systems

机译:晶格失配的外延层和其他系统中的失配应变和失配位错

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Heterostructures in the form of thin layers of one material grown on a substrate have been the subject of intense study for several years. In the case of semiconductor systems the aim is to grow epitaxial layers of, for example, Si1-xGex on Si, and devices based on such structures are already in use. Much is known, as is summarized in this review, about the stability of such systems against the insertion of dislocations, and about the critical thicknesses up to which strained layer structures are stable. The effects of dislocation nucleation and the dynamics of dislocation motion which lead to strain relaxation in metastable systems are also reviewed. The present state of theoretical understanding is compared with what is known experimentally. For metallic systems, which often exhibit magnetic properties, the underlying problems of lattice mismatch and strain relief are similar, but much of the interest has been concentrated on the commensurate-incommensurate transition in both structurally and magnetically modulated materials. The theory of this transition is reviewed, both for metallic systems and for epitaxial layers on graphite. In bringing together these different classes of systems within one review, it has been possible to demonstrate the parallels between them. It is hoped that, as a result, transfers of ideas between the fields will be promoted.
机译:多年来,一直在深入研究以一种在基材上生长的一种材料的薄层形式的异质结构。在半导体系统的情况下,目的是在Si上生长例如Si1-xGex的外延层,并且已经在使用基于这种结构的器件。正如在本综述中所总结的,关于这种系统抵抗位错插入的稳定性以及关于应变层结构稳定到的临界厚度的众所周知。还综述了位错形核的作用和位错运动的动力学,这些动力学导致了亚稳系统中的应变松弛。将理论理解的当前状态与实验已知的状态进行比较。对于通常表现出磁性的金属系统,基本的晶格失配和应变消除问题是相似的,但是很多兴趣都集中在结构和磁调制材料中的相称过渡。对于金属体系和石墨上的外延层,都对这种转变的理论进行了回顾。通过将这些不同类别的系统集中在一起进行审查,可以证明它们之间的相似之处。希望因此,将促进各领域之间的思想交流。

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