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首页> 外文期刊>Journal of Semiconductors >Analysis of AlGaN/GaN high electron mobility transistors failure mechanism under semi-on DC stress
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Analysis of AlGaN/GaN high electron mobility transistors failure mechanism under semi-on DC stress

机译:半导通直流应力下AlGaN / GaN高电子迁移率晶体管的失效机理分析

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摘要

Semi-on DC stress experiments were conducted on AlGaN/GaN high electron mobility transistors (HEMTs) to find the degradation mechanisms during stress. A positive shift in threshold voltage (V_T) and an increase in drain series resistance (R_D) were observed after semi-on DC stress on the tested HEMTs. It was found that there exists a close correlation between the degree of drain current degradation and the variation in V_T and R_D. Our analysis shows that the variation in V_T is the main factor leading to the degradation of saturation drain current (I_(DS)), while the increase in R_D results in the initial degradation of I_(DS) in linear region in the initial several hours stress time and then the degradation of V_T plays more important role. Based on brief analysis, the electron trapping effect induced by gate leakage and the hot electron effect are ascribed to the degradation of drain current during semi-on DC stress. We suggest that electrons in the gate current captured by the traps in the AlGaN layer under the gate metal result in the positive shift in V_T and the trapping effect in the gate–drain access region induced by the hot electron effect accounts for the increase in R_D.
机译:在AlGaN / GaN高电子迁移率晶体管(HEMT)上进行了半开式直流应力实验,以发现应力期间的降解机理。在测试的HEMT上施加半直流电压后,观察到阈值电压(V_T)出现正向偏移,漏极串联电阻(R_D)出现增加。发现在漏极电流的劣化程度与V_T和R_D的变化之间存在紧密的相关性。我们的分析表明,V_T的变化是导致饱和漏极电流(I_(DS))降低的主要因素,而R_D的增加会导致最初几个小时内线性区域中I_(DS)的初始降低。应力时间,然后V_T的降解起着更重要的作用。在简要分析的基础上,由栅极泄漏引起的电子俘获效应和热电子效应可归因于半导通直流应力期间漏极电流的降低。我们建议,栅极金属下方的AlGaN层中的陷阱捕获的栅极电流中的电子会导致V_T发生正向偏移,热电子效应在栅极-漏极访问区中的陷阱效应会导致R_D的增加。

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