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Sensitivity of MEMS microwave power sensor with the length of thermopile based on Fourier equivalent model

机译:基于傅立叶等效模型的热电长度微机电系统微波功率传感器的灵敏度

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摘要

A Fourier equivalent model is introduced to research the thermal transfer behavior of a terminatingtype MEMS microwave power sensor. The fabrication of this MEMS microwave power sensor is compatible with the GaAs MMIC process. Based on the Fourier equivalent model, the relationship between the sensitivity of a MEMS microwave power sensor and the length of thermopile is studied in particular. The power sensor is measured with an input power from 1 to 100 mW at 10 GHz, and the measurement results show that the power sensor has good input match characteristics and high linearity. The sensitivity calculated from a Fourier equivalent model is about 0.12, 0.20 and 0.29 mV/mW with the length at 40, 70 and 100m, respectively, while the sensitivity of the measurement results is about 0.10, 0.22 and 0.30 mV/mW, respectively, and the differences are below 0.02 mV/mW. The sensitivity expression based on the Fourier equivalent model is verified by the measurement results.
机译:引入傅立叶等效模型来研究端接式MEMS微波功率传感器的热传递行为。这种MEMS微波功率传感器的制造与GaAs MMIC工艺兼容。基于傅立叶等效模型,研究了MEMS微波功率传感器的灵敏度与热电堆长度之间的关系。功率传感器在10 GHz的输入功率下为1至100 mW进行测量,测量结果表明该功率传感器具有良好的输入匹配特性和高线性度。根据傅立叶等效模型计算得出的灵敏度分别为约0.12、0.20和0.29 mV / mW,长度分别为40、70和100m,而测量结果的灵敏度分别为约0.10、0.22和0.30 mV / mW,差异低于0.02 mV / mW。测量结果验证了基于傅立叶等效模型的灵敏度表达式。

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